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MAPLE ( Matrix
Assisted Pulsed Laser Evaporation) is a novel technique developed at Naval
Research Laboratory – Washington, by which is possible to deposit thin
films of biomaterials or polymers to build devices for microelectronics, non
linear optics and sensors.
Target is obtained
from a solution of biomaterial or polymer diluted in a volatile solvent
(matrix) in low concentrations and then solidified at liquid nitrogen
temperature.
An excimer laser
beam is directed with an angle of 45° to the frozen target and films grow
onto a substrate, in a configuration on axis, in a stainless steel chamber
under vacuum atmosphere. During laser-target interaction the solvent
molecules are evacuated by vacuum pump while the solute, due to a soft
evaporation, is collected on substrate.
This technique
allows a gentle processing, without damages, of deposited materials with all
advantages of pulsed laser deposition: thickness control, uniformity on
large area, good adherence and low thermal budget.
We realized thin layers of:
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